Luke M. BellaciniFollow
Robert T. FarrellyFollow

Analyzing the Effects of Thermal Deformation in EUV Lithography

Mentor/s

Ankush Gupta, Natheer Alatawneh

Participation Type

Poster

College and Major available

Computer Engineering BS, Electrical Engineering BS

Academic Level

Undergraduate student

Location

Digital Commons & West Campus West Building University Commons

Start Day/Time

4-25-2025 12:00 PM

End Day/Time

4-25-2025 2:00 PM

Students' Information

Luke Bellacini, BS Electrical Engineering and BS Computer Engineering, Honors, graduating 2025

Robert Farrelly, BS Electrical Engineering, Honors, graduating 2025

Creative Commons License

Creative Commons Attribution-Noncommercial 4.0 License
This work is licensed under a Creative Commons Attribution-Noncommercial 4.0 License

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Most Scholarly Impact or Potential, Most Creative, Best Writing

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Apr 25th, 12:00 PM Apr 25th, 2:00 PM

Analyzing the Effects of Thermal Deformation in EUV Lithography

Digital Commons & West Campus West Building University Commons